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Khabib Khumaini

Universitas Pertamina S1 - Kimia SINTA ID : 6782570
533
SINTA Score Overall
313
SINTA Score 3Yr
0
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0
Affil Score 3Yr
Latest number of Publication and Citations
Dimer Formation as the Key Removal Pathway in the Isotropic Atomic Layer Etching of Al2O3: A First-Principles Study
Authors : K Khumaini, HL Kim, T Nam, WJ Lee Chemistry of Materials 38 (6), 2658-2668, 2026
2026 0 cited
High-Temperature Atomic Layer Deposition of Thermal-Oxide-Quality SiO2 Using Methyltrichlorosilane
Authors : O Kim, JS An, T Chowdhury, C Kim, K Khumaini, HL Kim, JW Park, ... ACS Applied Electronic Materials 8 (1), 349-360, 2026
2026 0 cited
Chemisorption of tetrakis (dimethylamido) hafnium on hydroxylated HfO2: A comparative theoretical study with Zr and Ti precursors
Authors : YR Sriwijaya, K Khumaini, HL Kim, WJ Lee Journal of Vacuum Science & Technology A 44 (2), 2026
2026 0 cited
Effect of crystalline phase on the thermal atomic layer etching of aluminum oxide: a first-principles study
Authors : MH Ar-Raihan, K Khumaini, HL Kim, T Nam, WJ Lee Computational Materials Science 273, 114966, 2026
2026 0 cited
Reaction mechanism of atomic layer deposition of zirconium oxide using tris (dimethylamino) cyclopentadienyl zirconium: experimental and theoretical study
Authors : HL Kim, O Kim, YR Sriwijaya, K Khumaini, R Hidayat, WJ Lee Materials Advances 6 (4), 1414-1422, 2025
2025 2 cited
Thermal atomic layer etching mechanism of amorphous aluminum oxide by hydrogen fluoride and trimethylaluminum: First-principles study
Authors : K Khumaini, G Cho, HL Kim, WJ Lee Surfaces and Interfaces 72, 107114, 2025
2025 7 cited
Ligand Effects in Niobium Precursors for Atomic Layer Deposition of Niobium Oxide Films
Authors : CH Kim, K Khumaini, O Kim, HL Kim, JH Seok, JW Park, WJ Lee ECS Journal of Solid State Science and Technology 14 (12), 124001, 2025
2025 0 cited
Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study
Authors : T Chowdhury, K Khumaini, R Hidayat, HL Kim, WJ Lee Physical Chemistry Chemical Physics 26 (15), 11597-11603, 2024
2024 3 cited
Chemisorption of tetrakis (dimethylamino) zirconium on zirconium oxide: Density functional theory study
Authors : R Hidayat, HL Kim, YR Sriwijaya, K Khumaini, WJ Lee Surfaces and Interfaces 50, 104480, 2024
2024 8 cited
Corrigendum to “Effect of deposition temperature and surface reactions in atomic layer deposition of silicon oxide using Bis (diethylamino) Silane and ozone”.[Appl. Surf. Sci …
Authors : H Roh, HL Kim, K Khumaini, H Son, D Shin, WJ Lee Applied Surface Science 662, 159586, 2024
2024 0 cited
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Summary

Article Quartile
Research Output
  Scopus GScholar WOS
Article 20 26 8
Citation 157 226 26
Cited Document 14 16 5
H-Index 7 8 3
i10-Index 7 8 1
G-Index 1 1 1
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